The MFC600 series is a laminar differential pressure type mass flow meter/controller. Its structure includes a laminar differential pressure flow sensor, a high-precision proportional valve, and a control system. It features a built-in pressure and temperature compensation system and proprietary core algorithms that dynamically regulate the high-precision proportional valve to automatically control gas flow, providing more accurate and stable gas flow measurement and control.
Accuracy: 0.2% F.S.
Control Range: 1%~100% F.S.
5ms Measurement Response, 100ms Control Response
Flexible switching and mixing for 130+ gas types
Simultaneously measures standard flow rate and working flow rate
Range: 1 sccm-200 slm
Communication: Analog, RS485, RS232, CAN, DeviceNet, Profibus, EtherCat
|
Full scale flow |
Height |
Width |
Depth |
A |
B |
C |
D |
E |
Weight |
|
MFC600 |
145.8mm |
75.00mm |
33.80mm |
81.00mm |
20.00mm |
6.90mm |
3.00mm |
2 x M4↧ 8mm |
1.4kg |
|
5.745in |
2.955in |
1.33in |
3.19in |
0.788in |
0.272in |
0.118in |
2 x M4↧0.315in |
3.09 lb |
|
|
MFM600 |
146.30mm |
71.00mm |
28.60mm |
77.00mm |
15.00mm |
6.80mm |
3.00mm |
2 x M4↧ 8mm |
1.0kg |
|
5.764in |
2.80in |
1.127in |
3.034in |
0.591in |
0.268in |
0.118in |
2 x M4↧0.315in |
2.21 Ib |
CN
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