CN
Aitoly Instruments Co., Ltd
MFM330
Gas mass flow meter
Hotline:

+86) 0512-85162266

Home > Products >

A mass flow meter based on thermal technology

How MFM330 works
Features/Benefits:

Precise measurement/control of Gas Flow Rate

Fast response, high repeatability

Insensitive to temperature and pressure.

Low Pressure drop model available

Integrated display available

Cost-effective solution

Technical Specifications
Sensor and control performance
  • Applicable media
    Clean, dry gases
  • Gas Type
    Available for 98+types of gas
  • Full scale (N₂equivalent)
    10, 20, 50, 100, 300, 500 sccm
    0-1, 2, 5, 10, 20, 30, 50, 100, 200, 500slpm
  • Measurement range
    0.5%-100% F.S.
  • Accuracy
    ±0.5% F.S.
  • Repeatability
    ±0.2%F.S.
  • Linearity
    ±0.2%F.S.
  • Resolution ratio
    0.001 sccm (<10L/min), 1sccm (10-50L/min)
  • Sensor Response time
    <1s
  • Warm-up time
    5 min (T95), 30minfor optimum accuracy
Mechanical
Communications
Features
Dimensions
Full Scale Rate Height Width Depth A B C D E Weight
2 sccm~50 slpm 125.00 mm 76.00 mm 32.00 mm 64.00 mm 17.80 mm 7.00 mm 6.00 mm M4 ↓ 5 mm ≈0.82 kg
4.921 in 2.992 in 1.260 in 2.520 in 0.701 in 0.276 in 0.236 in M4 ↓ 0.197 in ≈2.1 lb
100 slpm~500 slpm 138 mm 82 mm 38 mm 62 mm 30 mm 10 mm 10 mm M4 ↓ 8 mm ≈1 kg
5.43 in 3.22 in 1.496 in 2.440 in 1.181 in 0.157 in 0.393 in M4 ↓ 0.31 in ≈2.21 lb
Product Selection
Copyright © Aitoly Instruments Co., Ltd All rights reserved Web design Registration Number:SuICP No. 2024140646-1
Legal statement / Privacy Statement /