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Products
300 Series
320 Series
MFM330
330 Series
350 Series
600 Series Flow Meters
Flow indicator
Multi-channel flow indicator
Air tightness leak detector
Applications
Semiconductor industry
Photovoltaic industry
Vacuum coating industry
Life sciences industry
Fuel cell industry
Biological fermentation industry
Elemental analysis instruments
Service & Support
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Manual
Specification
MFM / MFC330 User Manual
Time:
2025-02-25
Download
MFC300 Stepped Flow Installer (CAN, RS485 & RS232, AI Custom Protocol) - 0.1 sccm Accuracy (0-1 L)
Time:
2026-10-23
Download
MFC300 Stepped Flow Installer (CAN, RS485 & RS232, AI Custom Protocol) - 1 sccm Accuracy (1-5 L)
Time:
2026-10-23
Download
MFC300 One-to-One Flow Control Installer (RS485 & RS232, Standard Modbus Protocol)
Time:
2026-10-23
Download
MFC300 8-Channel Stepped Flow Software (CAN) - 0.1 sccm Accuracy (0-1 L)
Time:
2026-10-23
Download
Debugging Tool
Time:
2026-10-23
Download
Driver Installation Package
Time:
2026-10-23
Download
RS485 and EtherCAT PC Software
Time:
2026-10-23
Download
CAN Protocol PC Software
Time:
2026-10-23
Download
AITOLY Gas Correction Factor Software
Time:
2026-10-23
Download
MFC330 Stepped Flow Installer (CAN, RS485 & RS232, AI Custom Protocol) - 0.01 sccm Accuracy (Custom)
Time:
2026-10-23
Download
MFC330 (350) Flow Calibration PC Software
Time:
2026-10-23
Download
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Products
300 Series
320 Series
MFM330
330 Series
350 Series
600 Series Flow Meters
Flow indicator
Multi-channel flow indicator
Air tightness leak detector
Applications
Semiconductor industry
Photovoltaic industry
Vacuum coating industry
Life sciences industry
Fuel cell industry
Biological fermentation industry
Elemental analysis instruments
Service & Support
Customer Service
Downloads
News
Shows & Events
About Us
Company Profile
History
Certificates
Contact
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