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Aitoly Instruments Co., Ltd
320 Series
Gas Mass Flow Controller
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+86) 0512-85162266

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The MFC320 series is a newly upgraded MEMS gas mass flow meter/controller.

320 Series Operating Principle
Features

Accuracy: 0.5% F.S.

Control Range: 1%~100% F.S.

Operating Pressure Differential Range: 0-1 MPa

10ms measurement response, 300ms control response

Corrosion-resistant model available

Range: 1 sccm-200 slm

Communication methods: Analog, RS485, RS232, CAN, DeviceNet, Profibus, EtherCAT

Technical Parameters
Main Parameters
  • Medium Requirement
    Clean, dry, non-corrosive gas
  • Gas Types
    20+ (Anti-corrosion type optional)
  • Range
    0-1,5,10,20,50,100,300,500 sccm
    0-1,2,3,4,200 slpm
  • Measuring Range
    0.2% - 100% F.S. (1:500)
  • Control Range
    1% - 100% F.S. (1:100) (MFC)
  • Accuracy
    ±0.5%F.S.
  • Repeatability
    ±0.5%F.S.
  • Linearity
    ±0.2%F.S.
  • Resolution
    0.001 sccm
  • Sensor Response Time
    5ms
  • Control Response Time
    300ms
  • Warm-up Time
    ≤1s
  • Valve
    Normally Closed
  • Leak Rate
    1*10-11 Pa*m³/s He
Mechanical Characteristics
Electrical & Communication
Features
Dimensions
Model Selection
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