Aitoly Instruments Co., Ltd
MFC300-03D
Gas Mass Flow Controller
Hotline:

+86) 0512-85162266

MFC300, a mass flow controller based on MEMS technology, insensitive to both temperature and pressure.
Fast, Reliable and Repeatable performance designed for OEM, Laboratory, or Process flow control instrumentation

Working Principle of MFC300
Features

Fast Response: 5ms sensing response time, 300ms overall control response time

High repeatability, wide span ratio

Small footprint & Versatile installation,

No warm-up time needed, convenient to use.

Aitoly Flowsuite, free software tools

Technical parameters
Sensor and control performance
  • Applicable media
    Clean, dry, non-corrosive gases
  • Gas Type
    Air, N2, 02, Ar, CH4, CO2
  • Control andmeasurement range
    0.2%-100%F.S. (1:500)
  • Accuracy
    ±0.5%F.S.
  • Repeatability
    ±0.5%F.S.
  • Linearity
    ±0.2%F.S.
  • Resolution ratio
    0.1 sccm, 0-1000 sccm; 1 sccm, 1-5 slpm (0.01 sccm, 0-50 sccm Optional)
  • Sensor Response time
    5ms
  • Settling time (in control)
    300ms
  • Warm-up time
    ≤1s
  • Valve function
    Normally closed
Mechanical
Communications
Features
Dimensions
Full Scale Rate Height Width Depth A B C D E Weight
5 sccm~5 slpm 66.20 mm 51.00 mm 39.00 mm 43.70 mm 27.40 mm 4.30 mm 5.80 mm M4 ↓ 5 mm ≈0.38 kg
2.606 in 2.008 in 1.535 in 1.720 in 1.079 in 0.169 in 0.228 in M4 ↓ 0.197 in ≈0.84 lb
Model Selection
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