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Aitoly Instruments Co., Ltd
350 Series
Gas Mass Flow Controller
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+86) 0512-85162266

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The MFC350 series is a newly upgraded capillary thermal mass flow meter/controller.

350 Series Working Principle
Features

Accuracy: 0.5 % F.S.

Measuring Range: 0.5%~100% F.S.

Control Range: 1%~100% F.S.

Operating Pressure Difference Range: 0-1 MPa

≤1s Fast Response

Suitable for 90+ gas types

Range: 2 sccm-200 slm

Communication: Analog, RS485, RS232, CAN, EtherCat

Technical Parameters
Main Parameters
  • Medium Requirement
    Clean, dry gas
  • Gas Types
    Available for 130+ types of gas
  • Range
    0-1, 5, 10, 20, 50, 100, 300, 500 sccm
    0-1, 2, 3, 4, 200 slpm
  • Control Range
    1%F.S-100%F.S. (1:100)
  • Accuracy
    0.2% F.S
  • Repeatability
    0.05% F.S
  • Linearity
    0.1% F.S
  • Control Response Time
    100ms
  • Warm-up Time
    0s
  • Valve
    Normally Closed
  • Leak Rate
    1*10-10 Pa*m³/s He (FKM Seal)
    1*10-11 Pa*m³/s He (All-Metal Seal)
  • Resolution
    0.001sccm
Mechanical Characteristics
Electrical & Communication
Features
Dimensions
Model Selection
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