"This is our independently developed MFC330 series gas mass flow meter/controller, which can be used in semiconductors, photovoltaics, vacuum coating, life sciences, fuel cells, high-precision analytical instruments, petrochemicals, gas production, medical treatment, food, industrial automation control and other industries." On November 26, Yang Zhaobao, general manager of Suzhou Aituoli Electronic Equipment Co., Ltd. (hereinafter referred to as "Aituoli"), introduced the flow meter in his hand. On the same day, he officially settled in the Semiconductor Intelligent Manufacturing Innovation Port of Wujiang Development Zone with the project of "R&D and Industrialization of Semiconductor-grade Gas Mass Flow Meters".
The first phase of the Atoly factory opened this time covers an area of 1,000 square meters, equipped with 100,000-level and 1,000-level clean workshops, a professional R&D team and a complete service platform. "With a beautiful vision and firm belief for the future, we came to Wujiang Development Zone to start a new business, hoping to inject strong new impetus into the domestic substitution process of semiconductor core components in Wujiang and even the whole country." Yang Zhaobao said.
In order to break the situation that the core components of domestic gas mass flow meters rely on foreign imports, Yang Zhaobao started the comprehensive localization research and development of the core components of gas mass flow meters (mass flow sensors, miniature gas proportional valves) since 2019. As one of the very few companies in China that can independently develop and produce high-precision gas mass flow meters and gas mass flow controllers, the core components of its products, capillary column sensors and high-precision miniature gas proportional valves, are fully domestically produced, 100% self-developed and self-made, and the entire process is independently controllable, and its performance surpasses similar imported products.
"It took us nearly five years to make a breakthrough in this technology. I feel it is a very proud thing. We must innovate and make our own products in this country." Yang Zhaobao introduced that the company plans to complete the research and development of a high-performance gas mass flowmeter equipped with a domestically produced laminar differential pressure gas mass flow sensor and a piezoelectric all-metal sealed proportional valve in March 2025, and begin testing. It is expected to enter small-scale trial production and market promotion in June 2025.
Aitoly's vision is to become an innovative enterprise with outstanding influence in the field of fluid measurement and control. "We focus on the development of core components with completely independent intellectual property rights and full localization, in order to break the technical monopoly of imported products, completely get rid of dependence on imported brands, vigorously improve the level of localization substitution and application scale of high-end processes and high-end scientific research, and create high-end and reliable fluid measurement and control products that are fully localized as soon as possible to solve the "stuck neck" dilemma faced by my country's basic science and high-end process fields." Yang Zhaobao said frankly.
(The above is a schematic diagram of the effect, the actual building shall prevail)
In recent years, Wujiang Development Zone has aimed to cultivate the semiconductor intelligent equipment industry and build a semiconductor intelligent equipment industry cluster. Since May this year, 12 companies have settled in the semiconductor intelligent manufacturing innovation port. Aitoli will make great strides in the development zone by relying on the implementation of the "talent + technology + fund" project and riding on the "east wind" of the rapid development of the semiconductor industry.
"I think the English word 'Family' is the most appropriate to describe the affinity of Wujiang Development Zone. Wujiang Development Zone has provided our company with 'suitable soil, nutrients and sunshine' to help it thrive. In the future, Atoli will form a core team with innovative spirit and professional ability, including talents in R&D, technology, marketing, operations and other aspects. At the same time, it attaches importance to the different perspectives and ways of thinking of members from different backgrounds to help the team cope with various challenges in product innovation and market development." Yang Zhaobao said.
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