MFC330: A mass flow controller based on thermal technology. The mass flow controllers have a flow rate measurement section that includes a sensor, bypass, flow rate control valve, and special control circuitry.
Gas enters through the inlet joint and then bifurcates, flowing concurrently through the flow rate sensor and the bypass channel before exiting via the outlet joint. The flow rate measurement module is dedicated to quantifying the mass flow rate of the gas, while the control valve functions to dynamically adjust the flow rate, thereby minimizing the deviation between the measured flow rate and the preset signal until it reaches zero.
These units are equipped with a closed-loop circuit. Even if the secondary pressure fluctuations or ambient temperature variations that could potentially impact the supply pressure of the introduced gas, the system instantaneously initiates corrective measures to rectify the flow rate, guaranteeing highly stable flow rate control.
Precise measurement/control of Gas Flow Rate
Fast response, high repeatability
Insensitive to temperature and pressure.
Operating differential pressure
Low Pressure drop model available
All-metal proportional valve available
Integrated display available
Cost-effective solution
| Full Scale Rate | Height | Width | Depth | A | B | C | D | E | Weight |
| 2 sccm~50 slpm | 125.00 mm | 76.00 mm | 32.00 mm | 64.00 mm | 17.80 mm | 7.00 mm | 6.00 mm | M4 ↓ 5 mm | ≈0.96 kg |
| 4.921 in | 2.992 in | 1.260 in | 2.520 in | 0.701 in | 0.276 in | 0.236 in | M4 ↓ 0.197 in | ≈2.1 lb | |
| 100 slpm~500 slpm | 138 mm | 82 mm | 38 mm | 62 mm | 30 mm | 10 mm | 10 mm | M4 ↓ 8 mm | ≈1.3 kg |
| 5.43 in | 3.22 | 1.496 | 2.220 | 1.181 | 0.393 | 0.393 in | M4 ↓ 0.31 in | ≈2.88 lb |
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